Nanoelectromechanical Systems

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pages

212

ISBN

9781848216693

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Sorry, this entry is only available in French.

1. From MEMS to NEMS.
2. Transduction on the Nanometric Scale and the Notion of Noise.
3. Monolithic Integration of NEMS with their Readout Electronics.
4. NEMS and Scaling Effects.
5. Conclusion and Application Prospects: From Fundamental Physics to Applied Physics.

Laurent Duraffourg

Docteur en physique appliquée, Laurent Duraffourg dirige un laboratoire sur la nanophotonique et les capteurs optiques à Grenoble. Il est co-directeur de l’Alliance LETI-Caltech pour le développement de nanosystèmes à large échelle.

Julien Arcamone

Docteur en électronique et ingénieur en génie des matériaux, Julien Arcamone est responsable des partenariats industriels sur les M/NEMS, au sein du CEA-LETI.

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Nanoelectromechanical Systems

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Nanosystèmes électromécaniques

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