Nanoelectromechanical Systems (NEMS) are high-frequency mechanical systems which are fast and extremely sensitive at detecting minuscule forces or very low masses. These small devices are used to integrate electrical and mechanical functions on the nanoscale.
NEMS cover a large number of applications, ranging from signal processing to ultra-weak stimuli detection, and can form part of larger microsystems. Their low masses make them ideal candidates for identifying biomolecules in the living world or measuring cell strength. The potential of these components suggests they will play a major role in medical diagnosis, environmental monitoring and food quality monitoring.
This book presents theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors provide useful tools for future readers and an accurate picture of current and future research in the field.